Plasma Etching Processes For Interconnect Realization In Vlsi
Plasma EtchingVLSI InterconnectsSemiconductor FabricationIntegrated Circuit ManufacturingMicrofabrication
Plasma etching processes are indispensable for the precise fabrication and realization of interconnects within Very Large Scale Integration (VLSI) circuits. These advanced techniques enable the meticulous removal of material to form the critical metallic pathways that link millions of transistors, playing a vital role in the performance, reliability, and miniaturization of modern integrated circuits.